Ion energy and charge state distributions in zirconium nitride arc plasma
作者： Manish Chhowalla
DOI: 10.1063/1.1606107
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摘要: The charge states and ion energy distributions (IEDs) of cathodic arc zirconium (Zr) plasma in vacuum nitrogen are reported. dominant were found to be Zr4+ Zr2+, respectively. In addition Zrn+, N2+ N+ species along with ionized nitride (ZrNn+) also detected. peak energies all Zrn+ slightly higher (∼19 eV) than (∼15 eV). IEDs exhibited two peaks, one at 2–4 eV the other ∼15 eV. dual peaks indicate that some others emitted from, or near, surface cathode. ZrN2+ ZrN+ eV, indicating they from nitrided (“poisoned”) cathode dense region above spot.
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