Charge state dependence of cathodic vacuum arc ion energy and velocity distributions

摘要: In the literature, conflicting conclusions are reported concerning charge state dependence of cathodic arc ion energy and velocity distributions. It appears that data from electrostatic analyzers indicate energy, whereas time-of-flight methods support independence velocity. Here authors present charge-state-resolved distributions calculate corresponding in aluminum vacuum plasma. They show literature for two different characterization techniques may originate commonly employed interpretation velocity, which peak values average not carefully distinguished.