作者: W. L. Liu , M. Shamsa , I. Calizo , A. A. Balandin , V. Ralchenko
DOI: 10.1063/1.2364130
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摘要: The authors investigated thermal conductivity (K) in nanocrystalline diamond (NCD) films on silicon using the 3 ω and laser flash techniques. The K temperature dependence has been studied for the undoped and nitrogen-doped NCD films for T= 80–400 K and compared with that in microcrystalline diamond (MCD) films. The effects of phonon scattering from the grain boundaries and film interfaces on thermal conduction have been studied using three different models. For NCD the room temperature K is 0.1–0.16 W∕ cm K and decreases with …