Epitaxial Growth of SrTiO3Films on Pt Electrodes and Their Electrical Properties
作者： Kazuhide Abe , Shuichi Komatsu
DOI: 10.1143/JJAP.31.2985
关键词:
摘要: Heteroepitaxial SrTiO 3 films of perovskite structure with thicknesses of 46 to 184 nm were prepared by rf magnetron sputtering, holding substrate temperature at 400 C, on Pt films …
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jsap.jp参考文章(1)
Shintaro Yamamichi, Toshiyuki Sakuma, Koichi Takemura, Yoichi Miyasaka, SrTiO3Thin Film Preparation by Ion Beam Sputtering and Its Dielectric Properties Japanese Journal of Applied Physics. ,vol. 30, pp. 2193- 2196 ,(1991) , 10.1143/JJAP.30.2193