Acoustic sensor, its manufacturing method, and semiconductor electret condenser microphone using the same acoustic sensor

作者: Mamoru Yasuda , Takao Kawamura , Yoshiaki Ohbayashi

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摘要: The present invention relates to a semiconductor electret condenser microphone capable of being reduced in size and including an acoustic sensor 100 case 200 for accommodating the 100, has chip 110 forming necessary electronic circuits 111A 111C, opening through hole 112 away from electrode layer 120 formed on surface 112, member 130 laminated part diaphragm 140 provided with spacing 160 130, which exposed is connected 111a circuit (FIG. 6).

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