Electro-mechanical transducer, an electro-mechanical converter, and manufacturing methods of the same

摘要: An electro-mechanical transducer contains a vibrating electrode ( 15 b ), vibrating-electrode-insulating film ) disposed at bottom surface of the an electret layer 13 facing to electret-insulating 14 e joined top and back 17 in contact with ). A microgap between ten nanometers 100 micrometers is established central line average roughness Ra including bending, 1/10 or less gap width measured