Parametric resonance of a repulsive force MEMS electrostatic mirror

摘要: Abstract We investigate the nonlinear dynamic behavior of an electrostatic MEMS mirror. The mirror is driven by repulsive force actuators, which avoid pull-in instability and enable large travel ranges. In parallel-plate on structure toward substrate limiting range motion to capacitor gap. Unlike parallel-plate, actuators push away from not motion. highly nature motions create unique characteristics that differ actuators. Repulsive show linear natural frequency hardening with increased DC voltages unlike ones have softening. A parametric resonance another attribute as limitations a small gap are eliminated. To simulate system response, we use lumped parameter model cubic stiffness modulated excitation voltage causes resonances. Using shooting technique, obtained simulations agree well responses observed in our experiments. As limitation overcome, triggers principal resonances amplitudes primary resonance. more pronounced at low levels when geometric nonlinearities significant (axial stress low). While initial only 2 μm, under resonance, one-millimeter diameter reaches ±43 μm 1.2 kHz level VDC = 40 V, VAC =1 V vacuum. ability achieve actuation can serve improve signal-to-noise ratio speed various applications such confocal microscopy.