Microstructure and electrical properties of sputter-deposited Zn0.87Fe2.13O4 thin layers
作者： Stéphanie Capdeville , Pierre Alphonse , Corine Bonningue , Lionel Presmanes , Philippe Tailhades
DOI: 10.1063/1.1808904
关键词:
摘要: Sputtering deposition of spinel ferrites leads to a combination attractive physical properties (optical, magnetic, and semiconducting), which can be adjusted by carefully selecting the preparation conditions stoichiometry during controlled postdeposition annealing. Thin-sputtered ferrite films are great interest for integration as functional parts in microsystems. In this paper, we report effect on electrical microstructure sputtered zinc-ferrite films. Transmission electron microscopy atomic force were used observe these nanostructured layers. The measured surface area projected ratio was calculated basis Brunauer-Emmett-Teller measurements with krypton at 77K. contribution grains boundaries global resistivity studied spectroscopic impedance measurements. Impedance variations agreement evolution when argon pressure increased. i...
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