Epitaxial growth of Mn-doped γ-Ga2O3 on spinel substrate
作者： Hiroyuki Hayashi , Rong Huang , Fumiyasu Oba , Tsukasa Hirayama , Isao Tanaka
DOI: 10.1557/JMR.2010.32
关键词:
摘要: Mn-doped γ-Ga2O3 thin films with a defective spinel structure have been epitaxially grown on (100) substrates using pulsed laser deposition. The crystal quality of the is strongly dependent preparation conditions, particularly substrate temperature and energy density, as well Mn concentration. In 7 cation% film under optimized full width at half maximum in x-ray diffraction rocking curve for (400) plane 117 arcsec root-mean-square roughness surface approximately 0.4 nm. These values are comparable to those substrate. shows uniform tetragonal distortion tetragonality 1.05.
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Masahiro Orita, Hiromichi Ohta, Masahiro Hirano, Hideo Hosono, Deep-ultraviolet transparent conductive β-Ga2O3 thin films Applied Physics Letters. ,vol. 77, pp. 4166- 4168 ,(2000) , 10.1063/1.1330559
P.A. Langjahr, F.F. Lange, T. Wagner, M. Rühle, Lattice mismatch accommodation in perovskite films on perovskite substrates11Paper presented at Sympos. Synergistic Synthesis of Inorganic Materials, March 1996, Schloß Ringberg, Germany. Acta Materialia. ,vol. 46, pp. 773- 785 ,(1998) , 10.1016/S1359-6454(97)00259-0
Hiroyuki Hayashi, Rong Huang, Hidekazu Ikeno, Fumiyasu Oba, Satoru Yoshioka, Isao Tanaka, Saki Sonoda, Room temperature ferromagnetism in Mn-doped γ-Ga2O3 with spinel structure Applied Physics Letters. ,vol. 89, pp. 181903- ,(2006) , 10.1063/1.2369541
Naoyuki Ueda, Hideo Hosono, Ryuta Waseda, Hiroshi Kawazoe, Synthesis and control of conductivity of ultraviolet transmitting β-Ga2O3 single crystals Applied Physics Letters. ,vol. 70, pp. 3561- 3563 ,(1997) , 10.1063/1.119233
S Yoshioka, H Hayashi, A Kuwabara, F Oba, K Matsunaga, I Tanaka, Structures and energetics of Ga2O3 polymorphs Journal of Physics: Condensed Matter. ,vol. 19, pp. 346211- ,(2007) , 10.1088/0953-8984/19/34/346211
Kosuke Matsuzaki, Hiroshi Yanagi, Toshio Kamiya, Hidenori Hiramatsu, Kenji Nomura, Masahiro Hirano, Hideo Hosono, Field-induced current modulation in epitaxial film of deep-ultraviolet transparent oxide semiconductor Ga2O3 Applied Physics Letters. ,vol. 88, pp. 092106- ,(2006) , 10.1063/1.2179373
M Ogita, K Higo, Y Nakanishi, Y Hatanaka, Ga2O3 thin film for oxygen sensor at high temperature Applied Surface Science. ,vol. 175, pp. 721- 725 ,(2001) , 10.1016/S0169-4332(01)00080-0
Masahiro Orita, Hidenori Hiramatsu, Hiromichi Ohta, Masahiro Hirano, Hideo Hosono, Preparation of highly conductive, deep ultraviolet transparent β-Ga2O3 thin film at low deposition temperatures Thin Solid Films. ,vol. 411, pp. 134- 139 ,(2002) , 10.1016/S0040-6090(02)00202-X
T. Ohnishi, M. Lippmaa, T. Yamamoto, S. Meguro, H. Koinuma, Improved stoichiometry and misfit control in perovskite thin film formation at a critical fluence by pulsed laser deposition Applied Physics Letters. ,vol. 87, pp. 241919- ,(2005) , 10.1063/1.2146069
Jung-Il Hong, Joonho Bae, Zhong Lin Wang, Robert L Snyder, Room-temperature, texture-controlled growth of ZnO thin films and their application for growing aligned ZnO nanowire arrays Nanotechnology. ,vol. 20, pp. 085609- ,(2009) , 10.1088/0957-4484/20/8/085609