Mems membrane with integral mirror/lens

作者: Steven F. Nagle , Margaret B. Stern , Dale C. Flanders

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摘要: An optical membrane device (110) and method for making such a are described. This is notable in that it comprises an optically curved surface (250). In some embodiments, this (250) concave coated, example, with highly reflecting (HR) coating to create mirror. other the convex coated with, preferably, antireflective (AR) function as refractive or diffractive lens.

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