Microelectromechanically, tunable, confocal, vcsel and fabry-perot filter

摘要: A method of fabricating microelectromechanically tunable vertical-cavity surface-emitting laser (4) and Fabry-Perot filter (2) with precise lateral vertical dimensional control is disclosed. Strained reflective dielectric film stack (6) are applied to multiple quantum-well structure electronically band-gap-engineer the quantum wells. Strain in layers used create a curvature one stacks form confocal-cavity (8) between planar (10) curved (12) or filter, which also provided suspended membrane (37) that supports cavity-tuning stack, while being anchored at perimeter by meatal support posts (38). Precise air-cavity length dimensions achieved micro-die-casting using sacrificial material polyamide aluminum. Furtheing controlled electrostatic field.