Micro-displacement detector device, piezo-actuator provided with the micro-displacement detector device and scanning probe microscope provided with the piezo-actuator
作者： Tsugiko Takase , Hisanari Shimazu , Hideo Adachi , Hideo Tomabechi , Takao Okada
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摘要: A scanning tunnel microscope includes a piezo-actuator (16) movable in direction Z perpendicular to the surface of sample (12) and provided with probe (14) projected downward from bottom thereof. The is moved by (16). position measuring (22) therefrom, parallel (12), lower end one side reference (26) having concaves formed on thereof at predetermined intervals fixed When Z, along (26), so that current waveform which reproduces shape concaved detected. Thus, moving distance can be obtained
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