Flatness measuring apparatus

摘要: An elongated carriage has a first capacitive probe disposed from its top surface opposite to an object surface, and second bottom level reference surface. arm is orthogonally the member provide lateral support. The moveably supported at ends of distal end by three rolling members which roll in corresponding grooves supporting as moved increments with respect stationary surfaces. comprise capacitor, capacitor. As moves laterally, across while capacitance each translated into distance measurement. values derived capacitor are utilized generate numerical information describing flatness apparatus self-corrects for any translational deviations carriage.