Improved spatial resolution measurement system and method

摘要: The present invention discloses means and method for obtaining an increased spacial resolution from a sensor that includes probe having characteristic physical dimension limits its resolution. Such may include rectangular sensing surface wherein the sensitivity increases with area while decreases increasing area. object to be measured are controllably moved relatively each other in such way as define preselected increments of relative movement selected fraction probe. Data is collected at representative determined by data digitally filtered provide processed thereof fractional increment motion. In preferred embodiment, measurement system instant has exemplary utility wafer profiling station capacitive operable thickness regions located within one probe-width edge. two probes generally-rectangular element surrounded guard.