作者: Hiroyasu Nose , Akihiko Yamano , Hisaaki Kawade , Ken Eguchi , Eigo Kawakami
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摘要: An encoder includes an electrically conductive reference scale having surface steps formed at predetermined positions; probe a tip disposed opposed to the scale; wherein and are relatively movable in direction different from opposing of portion for applying electrical voltage between probe; detecting change tunnel current probe, which electric is applied by time relative movement when passes position step amount on basis detection portion.