Wideband reflective type sub-wavelength rectangular ring array quarter wave plate and manufacturing method thereof

摘要: The invention discloses a wideband reflective type sub-wavelength rectangular ring array quarter wave plate and manufacturing method thereof. comprises glass substrate, first metal layer, layer second which are sequentially arranged from bottom up, wherein the plurality of periodical two-dimensional annular aperture arrays; length L1 L2 every two adjacent apertures in equal, width W1 W2 very unequal; when incident linearly polarized light incomes upper part azimuth angle theta, phase difference phi x y reflectance field on orthogonal direction components is II/2, II or 3II/2; theta equal to 45 degrees, an amplitude component Ex Ey equal. With adoption optimal design, functions achieved position 1.55 mu m length, changes lower than 2% II/2 within range 130 nm ultra wide wavelength, reflectivity whole waveband reaches 90%.