Applications of ESCA to fabrication problems in the semiconductor industry
作者： Alberto Torrisi , Salvatore Pignataro , Giovanni Nocerino
DOI: 10.1016/0378-5963(82)90006-X
关键词:
摘要: Abstract Surface chemical states of materials involved in the fabrication semiconductor devices can often alter device properties and performances, reducing product yield. X-ray Electron Spectroscopy has been applied to some problems relevance power industry. It was found provide important information areas like those failure analysis, process improvement technological development as well basic research.
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