Velocity-dependent internal energy distributions of SiCl molecules, laser sputtered from silicon in a chlorine atmosphere

摘要: A silicon (111) surface is exposed to chlorine gas and irradiated by 248 nm photons. The vibrational rotational energy distributions of ground-state SiCl molecules ejected from the are determined using laser-induced fluorescence. results show a strong non-Boltzmann nature population dependent on quantum number. Besides this, first observation internal as function kinetic made for sputtered leaving surface. excitation increases with velocity.