作者: K. Santra , C.K. Sarkar , M.K. Mukherjee , B. Ghosh
DOI: 10.1016/0040-6090(92)90286-K
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摘要: … The system used to grow thin films by the plasma evaporation technique consists of a vacuum … The thin film material is evaporated using heaters and then the evaporated material is …