Influence of Sb doping on the structural, optical, electrical and acetone sensing properties of In2O3 thin films
作者： N.G. Pramod , S.N. Pandey
DOI: 10.1016/J.CERAMINT.2013.09.084
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摘要: Abstract Indium oxide thin films (undoped and Sb doped) have been grown by a chemical spray pyrolysis technique on glass substrates using indium nitrate antimony trichloride as the host dopant precursors respectively deionsied water solvent. In addition to studying acetone sensing properties, effect of doping structural, optical, electrical properties 2 O 3 film has investigated. X-ray diffraction analyses reveal that are polycrystalline in nature, possess cubic structure, crystallite sizes range 8–15 nm. The Sb-doped reduced crystallinity size compared undoped film. A change optical transmittance visible region well value band gap is observed upon doping. Further, incorporation also alters resistivity over wide temperature. gas investigated for various concentrations air at different operating temperatures. Among all four examined, 1.5 at.% shows highest region, least room temperature response (~95%) vapor an 300 °C concentration 80 ppm air.
sci-hub.se 参考文章(30)
C. Coutal, A. Azéma, J.-C. Roustan, Fabrication and characterization of ITO thin films deposited by excimer laser evaporation Thin Solid Films. ,vol. 288, pp. 248- 253 ,(1996) , 10.1016/S0040-6090(96)08824-4
Qun Zhang, Xifeng Li, Guifeng Li, Dependence of electrical and optical properties on thickness of tungsten-doped indium oxide thin films Thin Solid Films. ,vol. 517, pp. 613- 616 ,(2008) , 10.1016/J.TSF.2008.07.023
Q QI, T ZHANG, L LIU, X ZHENG, Q YU, Y ZENG, H YANG, Selective acetone sensor based on dumbbell-like ZnO with rapid response and recovery Sensors and Actuators B-chemical. ,vol. 134, pp. 166- 170 ,(2008) , 10.1016/J.SNB.2008.04.024
A. Moses Ezhil Raj, K.C. Lalithambika, V.S. Vidhya, G. Rajagopal, A. Thayumanavan, M. Jayachandran, C. Sanjeeviraja, Growth mechanism and optoelectronic properties of nanocrystalline In2O3 films prepared by chemical spray pyrolysis of metal-organic precursor Physica B-condensed Matter. ,vol. 403, pp. 544- 554 ,(2008) , 10.1016/J.PHYSB.2007.09.076
V.S. Vaishnav, P.D. Patel, N.G. Patel, Indium Tin Oxide thin film gas sensors for detection of ethanol vapours Thin Solid Films. ,vol. 490, pp. 94- 100 ,(2005) , 10.1016/J.TSF.2005.04.006
Preeti Pandey, J.K. Srivastava, V.N. Mishra, R. Dwivedi, Pd-gate MOS sensor for detection of methanol and propanol Journal of Natural Gas Chemistry. ,vol. 20, pp. 123- 127 ,(2011) , 10.1016/S1003-9953(10)60165-X
A. Galdikas, Z. Martūnas, A. Šetkus, SnInO-based chlorine gas sensor Sensors and Actuators B-chemical. ,vol. 7, pp. 633- 636 ,(1992) , 10.1016/0925-4005(92)80377-A
V.S. Vaishnav, P.D. Patel, N.G. Patel, Preparation and characterization of indium tin oxide thin films for their application as gas sensors Thin Solid Films. ,vol. 487, pp. 277- 282 ,(2005) , 10.1016/J.TSF.2005.01.079
S. Parthiban, V. Gokulakrishnan, K. Ramamurthi, E. Elangovan, R. Martins, E. Fortunato, R. Ganesan, High near-infrared transparent molybdenum-doped indium oxide thin films for nanocrystalline silicon solar cell applications Solar Energy Materials and Solar Cells. ,vol. 93, pp. 92- 97 ,(2009) , 10.1016/J.SOLMAT.2008.08.007
C.H. Lee, C.S. Huang, Spray pyrolysis deposition for indium oxide doped with different impurities Materials Science and Engineering: B. ,vol. 22, pp. 233- 240 ,(1994) , 10.1016/0921-5107(94)90250-X