Capillary actuator deployment
作者： Roman C. Gutierrez , Robert J. Calvet , Xiaolei Liu
DOI:
关键词:
摘要: A method for making an actuator includes forming a substantially planar device of electrically conductive material, the incorporating outer frame, fixed frame attached to moveable disposed parallel motion control flexure coupling coplanar, rectilinear movement relative and plurality interdigitated teeth, portion which is moving deployed position that coplanar with, spaced selected distance apart from fixing at rectilinear, perpendicular frame.
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