Microfabricated VHF acoustic crystals and waveguides
作者： Roy H. Olsson , Ihab F. El-Kady , Mehmet F. Su , Melanie R. Tuck , James G. Fleming
DOI: 10.1016/J.SNA.2007.10.081
关键词:
摘要: Abstract Microfabricated acoustic crystals have been designed and experimentally verified. The are realized by including tungsten (W) scatterers in a SiO2 matrix. Wide frequency ranges where waves forbidden to exist (acoustic bandgaps, ABG) formed due the large impedance mass density mismatch between W SiO2. crystal structures fabricated 7-mask process that features integrated aluminum nitride piezoelectric couplers for interrogating devices. Acoustic square lattice measured at 67 MHz with greater than 30 dB of rejection bandwidths exceeding 25% midgap. Single multimode waveguides defecting through removal subset scatterers. These achieve relative transmission up 100% propagating modes.
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