Surface-emitting laser diode with tunnel junction and fabrication method thereof
作者： Nobuaki Ueki , Hiromi Otoma , Jun Sakurai , Masateru Yamamoto
DOI:
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摘要: A surface emitting semiconductor laser diode of a tunnel junction type includes substrate, first reflector, second an active region disposed in series between the and reflectors, reflectors. The layer conductive that forms with layer, being composed supper-lattice at least partially aluminum is oxidized.
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