Multilayer heterostructures and their manufacture

摘要: A method of synthesizing multilayer heterostructures including an inorganic oxide layer residing on a solid substrate is described. Exemplary embodiments include producing by liquid coating process under relatively mild conditions. The conditions temperatures below 225° C. and pressures above 9.4 mb. In exemplary embodiment, solution diethyl aluminum ethoxide in anhydrous diglyme applied to flexible slot-die at ambient atmospheric pressure, the removed evaporation. An AlOx formed subjecting material remaining oven temperature approximately 150° resulting exhibits high light transmittance low vapor transmission rates for water. embodiment polyethylene napthalate (PEN). PEN not substantially adversely affected exposure