Substrate treatment system
作者： Henrik Obst
DOI:
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摘要: A substrate treatment system for treating substrates in a continuous process includes chamber delimited by walls, having an entry lock and exit lock, also at least one device transportation inside the chamber. The has arrangement of rollers arranged behind other direction, vertical or horizontal substrates. rotor drive is under pressure conditions prevailing stator outside
google.co.uk 参考文章(18)
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