Method for diffusion treatment of workpiece, involves moving workpiece between sequent diffusion processes by transfer area arranged between reaction chambers

摘要: In a process for the diffusion treatment of workpieces, in which same workpieces are subjected to at least two successive processes taking place reaction chamber under atmosphere, it is proposed that moved between through an evacuated region arranged chambers. order carry out method, device comprising first with means evacuation, supplying gas and heating chamber, one second be provided evacuation means, supply chambers, transfer supply.