Modular coater separation
作者： Hugues Wiame , Benoit Lecomte , Tomohiro Yonemichi
DOI:
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摘要: The invention relates to a process for depositing under vacuum multilayers coating stack on flat glass substrate and modular coater the deposit of thin layers substrate. A gas separation zone disposed between two zones comprises at least one injector in vicinity convoying path which passes through apertures from towards other via zone. allows improvement factor zones.
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