作者: Marcel Schloremberg , Jean-Marc Lemmer
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摘要: A sputter coating apparatus includes at least a first line and second line. The lines may be operated in parallel with one another certain embodiments order to independently form systems respective coated articles. However, the two also utilized so as operate series article. In latter case, transition zone is provided between an end of selectively couple output input when it desired utilize another. such manner, possible avoid many inefficiencies associated conventional apparatuses processes.