Isolation chamber and method of using the isolation chamber to make solar cell material

作者: Xinmin Cao , Bradley S. Mohring

DOI:

关键词: Solar cellContaminationIsolation tankAnalytical chemistryProcess engineeringEngineering

摘要: Apparatuses and methods are provided for the continuous formation of solar cell material including an isolation chamber that reduces cross contamination between adjacent zones at different pressures.

参考文章(5)
Craig Leidholm, Damoder Reddy, Process for making solar cells ,(2009)
Pravin K. Narwankar, Dieter Haas, Randhir P. S. Thakur, Hot wire chemical vapor deposition (cvd) inline coating tool ,(2010)
Yasushi Fujioka, Shotaro Okabe, Tadashi Hori, Takehito Yoshino, Masahiro Kanai, Akira Sakai, Continuous forming method for functional deposited films and deposition apparatus ,(1996)