Small two-dimensional and linear arrays of polycrystalline SiGe microbolometers at IMEC-XenICs

摘要: The state-of-the-art characteristics of polycrystalline SiGe microbolometer arrays are reported. An NETD 100 mK at a time constant 25 ms is achievable on 14×14 and 200×1 the system level. It result joint studies targeted 1/ f noise decrease, as well TCR uniformity improvements together with design optimization. Thanks to successful decrease SiGe, were moved from "1/ -noise limited" "system limited," i.e. case VO x arrays. mechanical pixels was improved affording very precise tuning infrared quarter-wave resonant cavity. resistance non-uniformity σ/μ better than 0.2% combined about 1% nonuniformity 100% pixel operability demonstrated. first lots 99.98% production yield have already been characterized results being