Polycrystalline SiGe technology for uncooled microbolometer arrays
作者： Vladimir N. Leonov , Claus Goessens , Chris Van Hoof , Bob Grietens , Natalia A. Perova
DOI: 10.1117/12.505836
关键词:
摘要: The technology for the small-size focal plane arrays and linear of polycrystalline SiGe microbolometers is developed at IMEC successfully transferred to its industrial partner XenICs. A NETD about 100 mK achievable readout level on 14×14 200×1 with 50 - 60 μm pixel pitch a time constant 20 25 ms. design pixels provides very precise tuning infrared resonant cavity. resistance TCR nonuniformity σ/μ better than 0.2% combined 1% noise 100% operability are demonstrated. first lot has been characterized, have assembled hybrid chips, supplied dedicated evaluation board software, results system testing being reported. possibility use as emitters investigated presented well.
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