Yield Learning with Layout-aware Advanced Scan Diagnosis

作者: Jayanth Mekkoth , Murali Krishna , Jun Qian , Will Hsu , Chien-Hui Chen

DOI: 10.31399/ASM.CP.ISTFA2006P0412

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摘要: … the yield learning by quickly isolating the failures and identifying the defect type (s). The … failure analysis to uncover the defect mechanism and ultimately in determining the root cause of …

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