MEMS Opportunities in Accelerometers and Gyros and the Microtribology Problems Limiting Commercialization

摘要: This paper discusses the application of surface micromachined technology to opportunities in accelerometers and gyros. Consideration is from design development two micron polysilicon mechanical structures (LPCVD) that are integrated with a BIMOS process on single IC chip. The limitations commercialization due high static friction (stiction) discussed especially consideration conflicting manufacturing processes required build an MEMS device minimize friction. product trends have larger compliance therefore require “nonsticky surfaces”. further complicated by robustness expectations very low ppm failure rates applications. gyro places additional challenges need for vibrational Q’s achieved vacuum environments. concludes identification critical research issues how industry can be enhanced better understanding Microtribology.