Nanotribology of MEMS/NEMS
作者： Jean-Pierre Celis , Satish Achanta , None
DOI: 10.1007/978-3-319-10560-4_27
关键词:
摘要: Micro-/Nano- electromechanical systems (MEMS/NEMS) are future devices that have a spectrum of applications ranging from rocket technology to biological sciences. Although MEMS known for over two decades, very few categories them used in commercially due their poor reliability. Tribological phenomena like stiction, friction, and wear major issues affecting the reliability contact MEMS/NEMS micromotors, microgears, nanosliders, etc., some examples which is greatly hampered by such dissipation processes. In recent years, lot research was dedicated improving through lab scale tribological studies e.g., nanotribological studies. Similar were earlier carried out on components magnetic storage devices, electrical connectors, successfully tackled. Present chapter an overview done years understand friction devices. This addresses variety problems associated with MEMS/NEMS, characterization in-situ techniques, various solutions respect problems.
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