Ultra-low energy micro-fluid ejection device
作者： Robert W. Cornell , Daniel L. Huber , Frank E. Anderson
DOI:
关键词:
摘要: A micro-fluid ejection device for ultra-small droplet and method of making a device. The includes semiconductor substrate containing plurality thermal actuators disposed thereon. Each the resistive layer protective protecting surface layer. together define an actuator stack thickness. thickness ranges from about 500 to 2000 Angstroms provides energy per unit volume 10 20 gigajoules cubic meter. nozzle plate is attached provide
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