Thermal printing head with an anti-abrasion layer and method of fabricating the same
作者： Haruo Sorimachi , Kiyoshi Satoh , Takumi Suzuki
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摘要: Cracks in an Ta 2 O 5 anti-abrasion layer of a thermal printing head resulting from the crystallization layer, are suppressed by addition SiO to layer. The is provided as uniform mixture and throughout sputtering target composed containing tantalum silicon ingredients onto antioxidation also subjected annealing stabilize resistivity heating elements.
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