Monte Carlo Simulation of the Electrodeposition of Copper I. Additive-Free Acidic Sulfate Solution

作者: Timothy J. Pricer , Mark J. Kushner , Richard C. Alkire

DOI: 10.1149/1.1488648

关键词:

摘要: Simulation of copper electrodeposition on an initially flat surface by a classic two-step electron transfer sequence accompanied diffusion was carried out three-dimensional (3-D) kinetic Monte Carlo model linked to 1-D (continuum) finite difference model. The evolution deposit roughness simulated numerically and compared, through use scaling parameters with experimental data obtained atomic force microscopy from deposits formed under constant potential in aqueous solutions 0.5 M Cu 2 SO 4 1.0 H . used carry parametric investigations the effect adsorption, diffusion, lattice incorporation, all which were found exert influence roughness.

参考文章(76)
L. Oniciu, L. Mureşan, Some fundamental aspects of levelling and brightening in metal electrodeposition Journal of Applied Electrochemistry. ,vol. 21, pp. 565- 574 ,(1991) , 10.1007/BF01024843
A. Hernández‐Creus, P. Carro, R. C. Salvarezza, A. J. Arvia, A Monte Carlo Simulation of Roughness Development during the Dissolution of a Pure Solid Journal of The Electrochemical Society. ,vol. 142, pp. 3806- 3811 ,(1995) , 10.1149/1.2048417
R.D. Armstrong, S.J. Churchouse, Electrocrystallisation simulation using a microcomputer Journal of Electroanalytical Chemistry. ,vol. 167, pp. 265- 274 ,(1984) , 10.1016/0368-1874(84)87071-9
H Shitamoto, O Okutani, T Nagatani, Deposit profiles in two-dimensional electrochemical deposition Journal of Physics D. ,vol. 31, pp. 1155- 1162 ,(1998) , 10.1088/0022-3727/31/10/005
R Gomer, Diffusion of adsorbates on metal surfaces Reports on Progress in Physics. ,vol. 53, pp. 917- 1002 ,(1990) , 10.1088/0034-4885/53/7/002
P. L'Ecuyer, Efficient and portable combined random number generators Communications of The ACM. ,vol. 31, pp. 742- 751 ,(1988) , 10.1145/62959.62969
Ken M. Takahashi, Electroplating Copper onto Resistive Barrier Films Journal of The Electrochemical Society. ,vol. 147, pp. 1414- 1417 ,(2000) , 10.1149/1.1393370
Andrea C Levi, Miroslav Kotrla, Theory and simulation of crystal growth Journal of Physics: Condensed Matter. ,vol. 9, pp. 299- 344 ,(1997) , 10.1088/0953-8984/9/2/001
John O. Dukovic, Charles W. Tobias, Simulation of Leveling in Electrodeposition Journal of The Electrochemical Society. ,vol. 137, pp. 3748- 3755 ,(1990) , 10.1149/1.2086296