A hybrid life cycle assessment of atomic layer deposition process

摘要: Abstract Atomic layer deposition (ALD), as a key enabling nano-manufacturing technology, has found wide range of potential applications in number industrial sectors. However, due to the binary reaction and self-limiting nature ALD process, its life cycle environmental impact is significant but never been investigated before. This study conducted using hybrid assessment (LCA) approach for evaluating comprehensive impacts process based on typical Al 2 O 3 high-k dielectric gate semiconductors. The inventory analysis process-based LCA data, economic input–output stoichiometric simulation data robust study. assessments are TRACI method, with both original U.S. normalized results analyzed. Normalized show that, among twelve selected categories, produces highest category fossil fuels use which 10 8 times that least air acidification potential. Significant differences also observed stages. associated auxiliary infrastructure, equipment, tools operation intensive mainly slow cycling process. provides support understanding nanotechnology useful sustainable scale-up technology future.