Conduit for high temperature transfer of molten semiconductor crystalline material

摘要: A conduit for high temperature transfer of molten semiconductor crystalline material consists a composite structure incorporating quartz tube as the innermost member, with an outer thermally insulating layer designed to serve dual purposes minimizing heat losses from and maintaining mechanical strength rigidity at elevated temperatures encountered. The ensures that only comes in contact (quartz) which it is compatible, while reinforces tube, becomes somewhat soft temperatures. To further aid preventing cooling semiconductor, distributed, electric resistance heater surface over most its length. has short end portions extend through melt are lef bare thermal insulation. provide increased input per unit area region adjacent these portions.