In situ x-ray diffraction studies on epitaxial VO2 films grown on c-Al2O3 during thermally induced insulator-metal transition

作者: Kunio Okimura , Joe Sakai , Shriram Ramanathan

DOI: 10.1063/1.3327422

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摘要: The structural phase transition (SPT) of VO2 films epitaxially grown on c-Al2O3 substrates by pulsed laser deposition and reactive sputtering was investigated in situ temperature-controlled x-ray diffraction (XRD) across metal-insulator (MIT). An intermediate insulator observed between room temperature monoclinic high metallic tetragonal phase. Gaussian curve fittings for measured XRD patterns revealed a significant contribution the covering wide range MIT. Polycrystalline Si pure rutile after MIT contrast with epitaxial substrates. Strained structure could be mechanism formation such known as M2 Presence highly oriented may an important factor understanding relation SPT.

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