Amorphous silicon photosensors for on-chip detection in digital microfluidic system

摘要: Abstract In this paper we present the integration, on a single glass substrate, of amorphous silicon photodiodes with an electrowetting-on-dielectric (EWOD) system as technological demonstrator for achieving compact, stand alone Lab-on-Chip (LoC) system. The EWOD comprises thin film indium tin oxide (ITO) acting actuation electrodes and 1 μm-thick polydimethylsiloxane (PDMS) layer both insulation hydrophobic layer. a-Si:H photosensors are ITO/p-type/intrinsic/n-type/metal stacked structures, aligned transparent electrodes, to detect optical signals generated inside (or modulated by) liquid droplets handled by digital microfluidic fabrication process has been designed performed taking into account compatibility all steps photosensor structures fabrication. successful integration demonstrated checking correct geometry measuring optoelectronic performances at end operation potentiality presented device assessed monitoring photodiode current when water droplet is moved forward backward over photosensors.