Optical and electrical properties of undoped and oxygen-doped a-GeC:H films prepared by magnetron sputtering
作者： N. Saito , I. Nakaaki , H. Iwata , T. Yamaguchi
DOI: 10.1016/J.TSF.2006.09.031
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摘要: Abstract Hydrogenated amorphous germanium carbon (a-GeC:H) alloy films have been prepared by magnetron sputtering of in methane–neon gas mixtures. The dependence structural, optical and electrical properties on the methane partial pressure (Rm) has investigated. With increasing Rm, concentration hydrogen bonded to carbon, band gap Eo, activation energy Ed dark conductivity σd increase, while Urbach Eu decrease. On basis these results, we made an attempt add oxygen a-GeC:H introducing during deposition. It is found that shows a maximum minimum as function pressure, Eo tend increase slightly.
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