T-Shape Suspended Silicon Nitride Ring Resonator for Optical Sensing Applications

摘要: A T-shape suspended silicon nitride racetrack ring resonator sitting on a dioxide pedestal is experimentally demonstrated. Compared with unsuspended device, it allows an enhanced interaction the surrounded environment while maintaining high quality factor. The consists of directional coupler waveguide width 1.3 $\mu \text{m}$ and structure curve radius 20 . More than $1.6\times 10^{4}$ factor at wavelength 1550.4 nm can be obtained, moderate extinction ratio $\sim 9.2$ dB free-spectral range 5.48 nm. measured device sensitivity 247$ nm/RIU. expected to have wide optical sensing application prospect.