Comparison of Nonlinear System Identification Methods for Free Decay Measurements with Application to MEMS Devices

摘要: A number of methods for non-linear system identification in the time and frequency domain have been developed past. These applied to many systems, ranging from micro-scale devices macro-scale sometimes with uncertain results. The aim this paper is assess efficiency a subset understand their range usability. considered study are restoring force surface (RFS), Hilbert transform (HT), zero-crossing (ZC), direct quadrature (DQ), short-time Fourier (SFT) asymmetric systems (ZCA). accuracy robustness against measured noise were evaluated using simulated data SDOF system. application selected MDOF was also investigated. It could be shown that under certain conditions these may still provide reliable results although generally use should avoided. micro-electro-mechanical-systems (MEMS). Unfortunately, due lack symmetry experimental data, only RFS ZCA used, leading finding MEMS device modelled quadratic stiffness.