Effects of Growth Temperature on the Properties of ZnO Thin Films Grown by Radio-frequency Magnetron Sputtering
作者： Shin-Ho Cho
DOI: 10.4313/TEEM.2009.10.6.185
关键词:
摘要: (Received October 14 2009, Revised November 30 Accepted December 15 2009) The effects of the growth temperature on properties ZnO thin films were investigated by using X-ray diffraction, scanning electron microscopy, ultraviolet-visible spectrophotometry, and Hall measurements. deposited rf magnetron sputtering at various temperatures in range 100-400
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