General Equations of Symmetrical Ellipsometer Arrangements

摘要: Simplified equations for two commonly used ellipsometer arrangements are derived, where the compensator is placed either before or after specimen and, at fixed azimuth, polarizer and analyzer azimuths adjusted null. The symmetry in equations, which arises from similar function characterizes specimen, clearly evident. In addition to considerable simplification of certain working analysis shows that measurement attenuation ratio independent properties azimuth. Also, practical interest, unambiguous determination can be made angular range retardation, whether 0≤Δ≤π π≤Δ≤2π.