作者: D. A. Holmes , D. L. Feucht
关键词:
摘要: Formulas are presented for the use of optical compensators in ellipsometers. Nothing need be known about compensator characteristics other than directions “fast” and “slow” axes. The formulas can used, without modification, when is not an exact quarter-wave plate, multiple internal reflections present, absorbing. Also described a method calibrating at same time it being used ellipsometry measurements.