Separation and regeneration apparatus and substrate processing apparatus
作者： Kazuyuki Mitsuoka , Takayuki Toshima , Takehiko Orii , Hiroki Ohno
DOI:
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摘要: Disclosed is a separation and regeneration apparatus which includes buffer tank configured to generate mixed liquid first fluorine-containing organic solvent having boiling point, second point higher than the point; distillation heat up temperature between so as separate into in gas state state; liquefy store sent from tank; tank.
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