Quantitative analysis of first and second surface layers by LEIS (TOF)
作者： T.M. Buck , G.H. Wheatley , D.P. Jackson
DOI: 10.1016/0167-5087(83)90989-4
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摘要: Abstract The time-of-flight version of low energy ion scattering LEIS (TOF), avoids uncertainties in quantitative analysis due to neutralization scattering. However, some other factors consider are: a) accuracy the cross-sections employed, b) enhancement yields from sub-surface layers by focusing effects, c) dependence detector efficiency on scattered energy, and d) background subtraction integration single-scattering peaks. We have investigated these problems using 2.4–10 keV Ne + beams a Cu 3 Au (100) ordered surface conjunction with computer simulation spectra found be most important potential source error. Correction are derived measurements yield vs E 0 .
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