Reducing adhesive failure during nanoimprint lithography demolding

摘要: Embodiments relate to a method of fabricating nano-sized structure in resin element by nanoimprint lithography (NIL). The reduces adhesive failure during NIL demolding inhibiting polymerization at the interface between and template. template includes compound. pressing onto (or template) form element. also including diffusing compound from element, e.g., holding them together for period time. A layer is therefore formed an inhibits interface. After diffusion, cured. Then removed